The small cross section single bearing positioning stage features a moving coil 3-phase cog-free brushless motor with single rail, two integral linear bearings and encoder. The stage features lightweight moving parts for higher acceleration of light loads. An open linear glass scale is available to meet customer requirements. Resolutions available are 1 and 5 micron.
The cog-free brushless linear motor provides smooth, high reliability, non-contact operation without backlash. Excellent dynamic and settling time performance is a result of the superior stiffness of brushless motors.
Single bearing positioning stages can be stacked on top of each other to provide a multiple axis positioning system. Typically, a wider cross section is used as the base axis for stability and stages with smaller cross sections stacked on top.
Extruded Positioning StageLSX series The Extruded Positioning Stage is ideally suited for long stroke high acceleration closed loop servo applications.
The extruded positioning stage is a cost-effective solution for those applications requiring less stringent positioning requirements. It features lightweight moving parts for high acceleration of light loads. The brushless linear motor provides smooth, highly reliable non-contact operation with no backlash or component wear. Dynamic performance with low settling times is provided by the brushless motor stiffness. Its essentially square shape and integral cable carrier allows mounting multiple stages close together. These stages can also be stacked to provide multi-axis positioning.
Enclosed Positioning StageLSE series The enclosed positioning stage is designed for closed position loop servo applications with one or more axes.
The enclosed stage features a moving coil 3 phase brushless motor with integral recirculating linear bearing and encoder. It features heavy duty construction with lightweight moving parts for higher acceleration.
Abbe error is minimized by centering the linear motor and encoder between two parallel rails. Multiple bearings support the payload, moving coil and encoder head. An enclosed or open linear scale is available to meet customer requirements. Standard 5 micron resolution is provided.
The brushless linear motor provides high reliability, non-contact operation with backlash or component wear. Dynamic performance with low settling times is provided by the stiffness of the linear brushless motor.
Enclosed stages can be stacked on top of each other to provide a multiple axis positioning system. Typically, the wider unit is used as the base axis for stability and stages with smaller cross sections stacked on top.
Sub-Micron Positioning StageNanoStepper The NanoStepper positioning stage (Patent Pending) is an innovative and cost-effective solution for any applications requiring both coarse and fine positioning. NanoStepper features four-axes of motion in a single plane with linear dual-axis air bearing steppers and dual-axis piezoelectric motors.
The positioner features a fast linear stepper with frictionless air bearing on a super-stiff platform for coarse position moves, inlaid with a piezoelectric stage (NanoMove) for fine more precise positioning moves. This combination reduces positioning time dramatically and moves of a few nanometers can be accomplished in milliseconds.
With its low profile, NanoStepper is versatile enough to be mounted either face up or inverted.
Applications -
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