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Microelectromechanical Systems (MEMS) Suppliers

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ISO 9001 is an umbrella term that refers to a standard developed and published by the International Organization for Standardization (ISO).

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Memsense - Rapid City, SD
Manufacturer
Manufacturer of Micro Electro Mechanical Systems (MEMS) precision inertial instruments, gyroscopes, accelerometers & magnetometers.
Plasma-Therm, LLC - St. Petersburg, FL
Distributor, Manufacturer
Manufacturer of plasma dry etching systems. Inductively coupled plasma (ICP) systems are suitable for the etching of compound semiconductor materials, dielectrics & some metals to highly physical processes using 2 MHz RF power source & 13.56 MHz RF bias power. Reactive ion etching (RIE) systems are suitable for Al metal etching & surface preparation before deposition or other process steps. Deep silicon etching (DSE) or deep reactive ion etching (DRIE) systems are suitable for MEMS & nanotechnology applications. Mask etchers are suitable for etching a wide variety of films from 250um to less than 32nm & feature CD uniformity & linearity below 5 nanometer. Some systems suitable for photomask applications.
Brand Names: Versaline
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