ASC Process Systems - Valencia, CA
Manufacturer, Custom Manufacturer, Service Company
PC based control systems for plasma etch machines. Experienced in retrofit of existing units, including APS.
www.aschome.com/ControlPowerSelection.htm

Optimation Technology, Inc. - Rush, NY
Manufacturer, Custom Manufacturer, Service Company
ISO 9001:2008 certified custom manufacturer of control systems including chemical vapor deposition (CVD), chemical vapor infiltration (CVI), volatile organic compound (VOC), resin transfer molding (RTM), plasma etch & precipitator control systems. Other control systems such as batch control systems, continuous control systems, PFD/P&ID control systems, process piping systems & process air systems are also available. Services include design engineering, fabricating, system simulation, installation & startup, validation, calibration & software, hardware & system support.
www.optimation.us/ControlsEngineering.aspx

BSET Plasmas - Concord, CA
Manufacturer, Service Company
Manufacturer of plasma etch control systems. Plasma system modes include down stream where the samples are placed on a neutral shelf surface for a gentle plasma effect, direct where the samples are placed on the power or ground shelves for maximum effect, directional where the samples requiring anisotropic etching or cleaning are placed on a special powered shelf & special where parallel plate configurations do not serve as optimum configuration, special electrode configurations are supplied.
bsetplasmas.com/nt_series.html

Noah Precision, LLC - Vancouver, WA
Distributor, Manufacturer
Manufacturer of control systems. Available as Point-of-Use thermoelectric temperature control systems for plasma etch applications. Features include frame-integrated, sub-floor tile mounting, free standing & 100 RTD platinum temperature sensor. Specifications include temperature range from -20 degrees C to 90 degrees C & 2.8 L (0.75 gal.) reservoir volume. Thermoelectric temperature control systems provide dynamic temperature control of the process chamber cathode/electrode/anode.
thermoelectricchillers.noahprecision.com/vi...

Plasma Etch Control Systems Products
	Point-of-Use (POU) Chillers for Semiconductor Process Equipment  MOCVD Thermoelectric Temperature Control Systems

Adaptive Motion Control Systems, Inc. - Wixom, MI
Manufacturer, Custom Manufacturer
Manufacturer of plasma etch control systems. Specifications of plasma etch control systems include 3.5 floppy drive, graphic touch screen monitor, 1024 x 1024 sensors bonded into glass, & storage capacity for more than 50,000 parts. Features include CD-ROM, RW drive, USB port, automatic editing features, programmable per bend, & multi GB hard drive.
Brand Names: Adaptive Motion