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Ebara Technologies
Sacramento, CA 95838   map
Phone: 916-920-5451, 800-535-5376 (toll free)
Fax: 916-925-6654
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Company description by
Worldwide manufacturer of a wide range of products, services and applications assistance to the semiconductor, R&D, university and industrial and chemical process industries. Worldwide supplier of More... Chemical Mechanical Polishing (CMP), advanced wafer plating systems, bevel and backside cleaning treatment systems. Complete product line is manufactured and designed with continued compliance and certification to the requirements of ANSI/ISO/ASQ Q9001:2008; Quality system in the United States and Japan. Less

Company Information

Q4 Essential Elements Newsletter
Q4 Essential Elements Newsletter
Company description by Ebara Technologies
The Most Efficient Dry Vacuum Pumps

Product Information

ESA Series - Dry Vacuum Pump ESA Series - Dry Vacuum Pump
The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed. The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.
EV-M Series - Dry Vacuum Pump
EV-M Dry vacuum pump series are designed on harsh process application featuring unique temperature control, on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. EV-M Series does not only achieving high process tolerance for harsh applications but also saving energy as well as dry pumps used for light duty applications. EV-M Series will contribute customer’s product throughput with its stable pumping operation for Middle Harsh & Harsh applications and provide longer term maintenance cycle. EV-M Series power consumption is less than our current harsh pump, EST Series by 50%. Customer can reduce COO with EV-M series. Optimization of root rotor arrangement achieves both of Reduction of Power consumption (50% vs. EST Series) and High temperature gas condition for harsh process capability. High Torque Motors and Inverters generate big torque as powerful as Manually rotated by hand. (Max. 260kg-cm)
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Company Data
Activities:Manufacturer, Custom Manufacturer, Service Company
Year Founded:1912
Certificate Available for DownloadISO 9001:2008
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