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Ebara Technologies

Sacramento, CA 95838   map
Contact Company: 800-535-5376
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Worldwide manufacturer of a wide range of products, services and applications assistance to the semiconductor, R&D, university and industrial and chemical process industries. Worldwide supplier of More... Chemical Mechanical Polishing (CMP), advanced wafer plating systems, bevel and backside cleaning treatment systems. Complete product line is manufactured and designed with continued compliance and certification to the requirements of ANSI/ISO/ASQ Q9001:2008; Quality system in the United States and Japan. Less

Company Information

Q4 Essential Elements Newsletter
Q4 Essential Elements Newsletter
Company description by Ebara Technologies
The Most Efficient Dry Vacuum Pumps

Product Information

EBT Series - Turbomolecular Pump
The EBT Series are mechanical bearing compound turbomolecular pumps which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series are highly efficient, cost effective solutions to your high vacuum pumping requirements. EBARA’s EBT Series compound turbomolecular pumps offer an extremely rugged mechanical bearing design which provides clean, reliable vacuum generation for today’s high tech manufacturing. Typical applications include semiconductor, thin film, photovoltaic and analytical instruments. EBARA’s EBT Series compound turbomolecular pumps can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high light gas compression, making them ideal for UHV and analytical systems. The EBT70 and EBT240 pumps are available with an optional integrated controller. All EBARA EBT Series compound turbomolecular pumps as available with either water or fan cooling, and the EBT70 is available with convection cooling.
ESR Series - Dry Vacuum Pump
The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 CFM with an ultimate pressure as low as 1 mTorr. Built on EBARA's experience, the ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and motor controls. These enhancements drastic reduces utility consumption (electrical power, cooling water, nitrogen, footprint) compared to AC motored pumps. Intelligent controls allows the ESR Series pumps to be tuned to the vacuum requirements can be throttled down and be placed in an idle mode when not used for processing. For clean application no nitrogen purge is required. A minimal amount of nitrogen purging along with the pump constructed out of NiResist (homogeneous steel alloy with high nickel content) makes the ESR ideal for pumping corrosive gases. EBARA is a world leader in the design and manufacture of "dry" mechanical vacuum pumps. EBARA dry vacuum pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership.
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Company Data
Activities:Manufacturer, Custom Manufacturer, Service Company
Year Founded:1912
Certificate Available for DownloadISO 9001:2008
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